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Title:
Evacuation device
Document Type and Number:
Japanese Patent JP5996834
Kind Code:
B2
Abstract:
The present invention is an apparatus and method for evacuating a number of vacuum processing chambers containing incompatible gases. The gases are directed to a subatmospheric abatement chamber containing preconditioning devices. The gases are treated in the abatement chamber to render them compatible. The compatible gases are then drawn from the abatement chamber as a single stream through a backing pump.

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Inventors:
Bailey, Christopher M
Borger, Michael Es
Application Number:
JP2007544406A
Publication Date:
September 21, 2016
Filing Date:
November 23, 2005
Export Citation:
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Assignee:
Edwards Vacuum LRC
International Classes:
B01J3/02; F04B37/16; B01D53/70; B01D53/77; B01D53/78; B01D53/81; C23C16/44; F04D19/04; F04D25/00; F04D25/16; H01L21/02; H01L21/205; H01L21/3065
Domestic Patent References:
JP11168067A
JP2003245520A
Attorney, Agent or Firm:
Shinjiro Ono
Yasushi Kobayashi
Wataru Kitakita



 
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