Title:
Evacuation device
Document Type and Number:
Japanese Patent JP6009193
Kind Code:
B2
Abstract:
The present invention relates to a vacuum evacuation apparatus which can be mounted in a posture that can freely be selected a vacuum evacuation apparatus for evacuating a container from an atmospheric pressure to a high vacuum or less includes a first vacuum pump for evacuating the container to a high vacuum or less, and a second vacuum pump for evacuating the container from an atmospheric pressure to a medium or low vacuum the first vacuum pump and the second vacuum pump are integrally connected to each other into an integral unit.
Inventors:
River Saki Hiroyuki
Takuji Sofukawa
Atsushi Oyama
Takuji Sofukawa
Atsushi Oyama
Application Number:
JP2012080559A
Publication Date:
October 19, 2016
Filing Date:
March 30, 2012
Export Citation:
Assignee:
Ebara Corporation
International Classes:
F04B37/16; F04D19/04
Domestic Patent References:
| JP2007231935A | ||||
| JP2045423U | ||||
| JP2008510093A | ||||
| JP2006037951A | ||||
| JP2007231938A | ||||
| JP8017379A | ||||
| JP60022496A | ||||
| JP57052396A | ||||
| JP2004100594A | ||||
| JP2002168192A | ||||
| JP60028298U |
Foreign References:
| DE102009037010A1 | ||||
| EP0931939A2 |
Attorney, Agent or Firm:
Isamu Watanabe
Ryoji Kosugi
Tetsuya Hirosawa
Ryoji Kosugi
Tetsuya Hirosawa