Title:
EVALUATION DEVICE
Document Type and Number:
Japanese Patent JP2013167652
Kind Code:
A
Abstract:
To provide an evaluation device capable of specifying a cause of abnormality in a repetition pattern.
An evaluation device 1 comprises: an illumination system 30 for irradiating linear polarization L1 onto a surface of a wafer 10 comprising a prescribed repetition pattern; a light reception system 40 for detecting a polarization state of elliptical polarization L2 which is regular reflection light from the repetition pattern irradiated with the linear polarization L1; and an image processing section 50 for evaluating a shape of the repetition pattern on the basis of the polarization state of the elliptical polarization L2 detected by the light reception system 40.
Inventors:
KUDO YUJI
FUKAZAWA KAZUHIKO
FUKAZAWA KAZUHIKO
Application Number:
JP2013119752A
Publication Date:
August 29, 2013
Filing Date:
June 06, 2013
Export Citation:
Assignee:
NIKON CORP
International Classes:
G01N21/956; G01J4/04; G01N21/21
Domestic Patent References:
| JP2006170996A | 2006-06-29 | |||
| JP2008020374A | 2008-01-31 | |||
| JPH10293065A | 1998-11-04 | |||
| JP2002116011A | 2002-04-19 | |||
| JP2006135211A | 2006-05-25 |
Attorney, Agent or Firm:
Masago Onishi
Hiroshi Kawano
Namiki Toshiaki
Hiroshi Kawano
Namiki Toshiaki
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