Title:
圧電セラミックス焼結体の評価方法、積層型圧電セラミックス素子の評価方法及び積層型圧電セラミックス素子の評価装置
Document Type and Number:
Japanese Patent JP4155466
Kind Code:
B2
Abstract:
To evaluate displacement of a laminated piezoelectric ceramics element without applying a prescribed voltage.
This method for evaluating the laminated piezoelectric ceramics element acquired by sintering a laminate formed by laminating a piezoelectric ceramics layer precursor and an internal electrode precursor together is characterized by having a step for irradiating the laminate or the laminated piezoelectric ceramics element subjected to removal treatment of an organic binder included in the internal electrode precursor with an inspection light, and a step for observing the reflected light of the inspection light from the laminate or the laminated piezoelectric ceramics element.
COPYRIGHT: (C)2007,JPO&INPIT
Inventors:
Satoshi Ozawa
Masayoshi Inoue
Masaru Nanao
Masayoshi Inoue
Masaru Nanao
Application Number:
JP2005145423A
Publication Date:
September 24, 2008
Filing Date:
May 18, 2005
Export Citation:
Assignee:
tdk Corporation
International Classes:
G01N21/47; C04B35/00; G01N21/27; H01L41/083; H01L41/22; H01L41/273; H01L41/297
Domestic Patent References:
| JP2002234775A | ||||
| JP3287051A | ||||
| JP2003529917A | ||||
| JP2004296785A | ||||
| JP200326473A | ||||
| JP4324687A | ||||
| JP2003218666A | ||||
| JP2003152495A | ||||
| JP3585947B2 | ||||
| JP200339657A | ||||
| JP2002293608A | ||||
| JP9166543A | ||||
| JP3186308B2 |
Attorney, Agent or Firm:
Mitsuru Oba
Horikawa Miyuki
Horikawa Miyuki