Title:
評価方法
Document Type and Number:
Japanese Patent JP4416547
Kind Code:
B2
Abstract:
An evaluation apparatus which evaluates a sample. The apparatus includes a light source which irradiates the sample with light, an imaging spectrometer which spectroscopically measures light reflected by the sample and senses an image, a first calculator which obtains amplitude information on an amplitude of a spectral reflectance of the sample based on the image sensed by the imaging spectrometer within a predetermined wavelength range of spectral reflectance spectra obtained by the spectrometer, a memory which holds in advance relationship information representing a relationship between the amplitude information of the spectral reflectance and an absorption coefficient, and a second calculator which obtains an absorption coefficient of the sample based on the amplitude information obtained by the first calculator and the relationship information held in the memory.
Inventors:
Yuichi Masaki
Yutaka Akino
Yutaka Akino
Application Number:
JP2004082930A
Publication Date:
February 17, 2010
Filing Date:
March 22, 2004
Export Citation:
Assignee:
Canon Inc
International Classes:
G01N21/27; G01J3/28; G01J4/00; G01N21/31; H01L21/02; H01L21/66; H01L27/12
Domestic Patent References:
| JP2000314612A | ||||
| JP7174525A | ||||
| JP2000260967A | ||||
| JP2000349264A | ||||
| JP56115905A | ||||
| JP60073407A |
Attorney, Agent or Firm:
Yasunori Otsuka
Shiro Takayanagi
Yasuhiro Otsuka
Shuji Kimura
Shiro Takayanagi
Yasuhiro Otsuka
Shuji Kimura