Title:
EVAPORATING SOURCE BY RESISTANCE HEATING
Document Type and Number:
Japanese Patent JPS5675571
Kind Code:
A
Abstract:
PURPOSE: To make possible continuous vacuum deposition owing to linear supply by spray-coating metal or metallic compound contg. tungsten, tungsten carbide and molybdenum onto composite boat surface.
CONSTITUTION: A composite boat is degreased and cleaned with acetone or the like, after which metal or metallic compound contg. one or more kinds of tungsten, tungsten carbide and molybdenum is plasma-sprayed on its surface, whereby a film is formed. The thickness of the spray-coated film is made to ≤80μ.
Inventors:
TANIGAWA YOSHIYUKI
IKEDA TANEJIROU
NOGAWA KENJI
NOHARA SHINKICHI
IKEDA TANEJIROU
NOGAWA KENJI
NOHARA SHINKICHI
Application Number:
JP15121679A
Publication Date:
June 22, 1981
Filing Date:
November 21, 1979
Export Citation:
Assignee:
MATSUSHITA ELECTRIC IND CO LTD
International Classes:
C23C4/06; C23C14/24; C23C14/26; (IPC1-7): C23C7/00; C23C13/12