PURPOSE: To uniformize the quality of a thin film vapor deposited on a substrate by evaporating plural evaporating materials in a heater from the evaporation port of the heater and moving the evaporating materials in the heater.

CONSTITUTION: An evaporation port 2c is formed in the wall of a heater 2 between the inlet 2a at one end and the outlet 2b at the other end. Plural evaporating materials 3 are arranged in a line in the heater 2 and evaporated from the port 2c. The evaporating materials 3 in the heater 2 are continuously or intermittently moved with a pressing mechanism 4 so that the rate of evaporation from the port 2 can be prevented from lowering with the lapse of time.