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Title:
EVAPORATION SOURCE FOR ORGANIC COMPOUND
Document Type and Number:
Japanese Patent JPH06349809
Kind Code:
A
Abstract:

PURPOSE: To prevent a powder of organic compound raw materials from scattering during evaporation to outside an evaporation source and to secure a stable evaporation amount of the organic compound raw materials at all times.

CONSTITUTION: Raw materials of an organic compound 2 are placed in an evaporation material container 1, around the outside of which a heater for heating evaporation materials 3 is wound. Also, a filter 4 comprising a 1mm- thick formed metal is mounted on the top of the container 1 which is heated by a heater 5 to over the evaporation temperature. Thermocouples 6 and 7 are provided. A powder of organic compound raw materials scattering from the evaporation surface is prevented by the filter 4 from further scattering to the outside of the evaporation material container 1 to produce an organic thin film having few pinholes. Clogging of the filter 4 by the powder is prevented by heating the filter 4 higher than the evaporation temperature.


Inventors:
TAKAHASHI YOSHIKAZU
Application Number:
JP13865693A
Publication Date:
December 22, 1994
Filing Date:
June 10, 1993
Export Citation:
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Assignee:
ULVAC CORP
International Classes:
H01L21/31; (IPC1-7): H01L21/31
Attorney, Agent or Firm:
Shigeru Yagita (4 outside)



 
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