To provide an evaporation source which can reduce a loss of materials, or prevents a change of internal pressure being hindrance to stable vapor deposition, an organic EL-device manufacturing device suitable for the evaporation source, and an organic EL-device manufacturing method.
In the evaporation source having a crucible housing the vapor deposition materials therein, a heater for evaporating and sublimating the vapor deposition materials by heating them, and a plurality of evaporated-substance injection port parts which align evaporated-substance injection ports in a line shape for injecting the evaporated and sublimated evaporation materials, the evaporation source is firstly characterized by being formed with the plurality of evaporated-substance injection ports, and having an opening/closing unit which is opened and closed at each evaporated-substance injection port. Furthermore, the evaporation source is secondly characterized by having a controller which controls the opening/closing unit so as to open at least one evaporated-substance injection port part among the plurality of evaporated-substance injection port parts, and to close all of the other evaporated-substance injection port parts at that time.
KATO NOBORU
YUMIBA KENJI
ZUSHI AN
