Title:
蒸発源及びこれを備えた蒸着装置
Document Type and Number:
Japanese Patent JP5261404
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide an evaporation source which can prevent a vapor deposition material from being condensed in a nozzle.SOLUTION: The evaporation source includes: a housing 60 of which one surface is opened; a storing part 20 positioned inside the housing 60, in which an organic matter is stored, and of which one surface is opened; a nozzle 30 coupled to the opened part of the storing part 20 and injecting the vapor deposition material; and a heater 40 interposed between the storing part 20 and the housing 60.
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Inventors:
Hiroshi Anzai
Lee Star
Zheng Xin Jian
Zhaoyuan Tin
Yasushi Satoshi
Lee Star
Zheng Xin Jian
Zhaoyuan Tin
Yasushi Satoshi
Application Number:
JP2010003358A
Publication Date:
August 14, 2013
Filing Date:
January 08, 2010
Export Citation:
Assignee:
Samsung Display Co.,Ltd.
International Classes:
C23C14/24; H01L51/50; H05B33/10
Domestic Patent References:
| JP2004091926A | ||||
| JP2004315898A | ||||
| JP2005054270A |
Attorney, Agent or Firm:
Hatta International Patent Corporation