Title:
交換装置、及び交換方法
Document Type and Number:
Japanese Patent JP7412542
Kind Code:
B2
Abstract:
A replacing apparatus is configured to replace a processing tool in a processing apparatus. The processing apparatus includes a holder configured to hold a processing target object, a processing mechanism to which the processing tool configured to process the processing target object held by the holder is installed in a replaceable manner, and an exterior cover accommodating therein the holder and the processing mechanism. The replacing apparatus includes a replacing mechanism, a moving mechanism, a traveling table and a traveling mechanism. The replacing mechanism installs the processing tool to the processing mechanism, or separates the processing tool from the processing mechanism. The moving mechanism is configured to move the replacing mechanism from an outside of the exterior cover to an inside thereof through an entrance opening of the exterior cover. The traveling table supports the moving mechanism. The traveling mechanism is configured to allow the traveling table to travel.
Inventors:
Yasutaka Mizomoto
Susumu Hayakawa
Susumu Hayakawa
Application Number:
JP2022517592A
Publication Date:
January 12, 2024
Filing Date:
April 07, 2021
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
B24B45/00; B23Q3/155; B24B55/06; H01L21/304; H01L21/677
Domestic Patent References:
| JP2012183629A | ||||
| JP2012056024A | ||||
| JP2010017796A | ||||
| JP8229812A | ||||
| JP2012232397A | ||||
| JP2002144183A |
Foreign References:
| WO2020049701A1 |
Attorney, Agent or Firm:
Tadashige Ito
Tadahiko Ito
Tadahiko Ito