Title:
EXCIMER LAMP AND EXCIMER LIGHT EMITTING DEVICE
Document Type and Number:
Japanese Patent JP3282798
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide an excimer lamp of which internal tube can be cooled with a simple and safe method and also provide an excimer light emitting device using such an excimer lamp.
SOLUTION: This lamp is an excimer lamp 1 which is provided with a discharge container 2 formed from a dielectric excellent in light transmittance, an internal tube 3 arranged inside the discharge container 2, an external electrode 11 arranged outside the discharge container 2, an internal electrode 5 arranged inside the internal tube 3, and a discharge filler gas 6 filled in the discharge container 2, and with which the excimer is formed by applying a high-frequency voltage between the external electrode 4 and the internal electrode 5, and the internal tube 3 is cooled by a nitrogen gas 7 introduced into the internal tube 3. In order to cool it particularly efficiently, it is preferable that a ratio (d/D) of the inside diameter (d) of the internal tube 3 to the outside diameter D of the internal electrode 5 should be set in the range of 1.1 to 3.0 and a ratio (L/D) of the length L of the internal electrode 5 to the outside diameter of the internal electrode 5 should be set not less than 10 and less than 30.
Inventors:
Masaru Nakamura
Application Number:
JP12719598A
Publication Date:
May 20, 2002
Filing Date:
May 11, 1998
Export Citation:
Assignee:
Quark Systems Inc.
Watanabe Shoko Co., Ltd.
Watanabe Shoko Co., Ltd.
International Classes:
F21V29/00; H01J61/52; H01J65/00; (IPC1-7): H01J65/00; F21V29/00; H01J61/52
Domestic Patent References:
| JP4301357A | ||||
| JP7169443A |
Attorney, Agent or Firm:
Yasuo Ishikawa