To provide an excimer lamp lighting device in which the constitution of its circuit system is simplified without making a power source circuit which supplies input electric power to a heating mechanism complicated in constitution nor larger in size.

The excimer lamp lighting device is provided with an excimer lamp 5 encapsulating a rare gas in its discharge space, power sources 1 and 3 for lighting the excimer lamp 5, and a lamp house 9 in which the excimer lamp 5 is arranged. The device is also provided with a glass-made window 8 which transmits the excimer light radiated from the excimer lamp 5 to the lamp house 9. The window 8 is provided with an induction heating coil 6 fed with electric power from the power source 1 for lighting the excimer lamp 5; and an induction heating conductor 7 which is induction heated by the induction heating coil 6, formed to transmit the excimer light from the window section 8, and heats the window 8.