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Title:
EXCIMER LAMP, METHOD FOR LIGHTING THE SAME, AND MANUFACTURING METHOD FOR THE SAME
Document Type and Number:
Japanese Patent JP2022182685
Kind Code:
A
Abstract:
To provide an excimer lamp that lights efficiently while improving the lighting start-up of the lamp.SOLUTION: An excimer lamp 10 includes an outer tube 20 and an inner tube 50 arranged coaxially in the outer tube 20. The inner tube 50 covers an inner electrode 30. A main discharge space S1 is formed between the outer tube 20 and the inner tube 50. A discharge space for lighting start-up assistance (hereinafter referred to as "auxiliary discharge space") S2 is formed between the inner electrode 30 and the inner tube 50.SELECTED DRAWING: Figure 2

Inventors:
FUJIMORI AKIYOSHI
KANAI NOBUO
FUKUDA TAKESHI
MOROZUMI YOJI
Application Number:
JP2021090380A
Publication Date:
December 08, 2022
Filing Date:
May 28, 2021
Export Citation:
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Assignee:
ORC MFG CO LTD
International Classes:
H01J65/00; H01J9/26; H01J9/28; H01J61/16
Attorney, Agent or Firm:
Takashi Matsuura
Hiroki Ogura