To provide an excimer laser apparatus in which the high-speed rotation of a circulating fan can be performed easily and in which the installation space of a bearing part and that of a motor part can be reduced.
This excimer laser apparatus is provided with a laser container 1, in which a laser gas including a halogen-based gas is sealed. The excimer laser apparatus is provided with a pair of main discharge electrodes 2, 2 which are positioned inside the laser container 1 and which are used to obtain discharge capable of oscillating a laser beam. The excimer laser apparatus is provided with a circulating fan 3, which comprises a shaft 4 and which creates the high-speed flow of the laser gas between the pair of main discharge electrodes 2, 2. The shaft 4 is constituted, in such a way that both ends of it are supported rotationally by rotor-stator mechanisms 11, 12. The rotor-stator mechanisms 11, 12 are constituted with rotors 11d, 12d constituted of a magnetic material attached to the shaft 4 of the circulating fan 3, with stators 11b, 12b installed in positions facing the rotors 11d, 12d, and a motor winding 14 which gives a turning force to the rotors 11d, 12d and a position control winding 15 which develops a magnetic force used to levitate and support the rotors 11d, 12d attached to the stators 11b, 12b.
OSAWA SUSUMU
MORI SATOSHI
SATO TADASHI
NAKAZAWA TOSHIHARU
EBARA DENSAN LTD