Title:
EXHAUST DEVICE, SUBSTRATE PROCESSING DEVICE AND EXHAUST METHOD
Document Type and Number:
Japanese Patent JP2015129602
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide an exhaust device, a substrate processing device and an exhaust method capable of preventing dust generating foreign substances from flowing to the outside of an exhaust passage, and to efficiently prevent the dust generating foreign substances from attaching to a wall surface of a second exhaust passage adjacent to an end part of the exhaust passage.SOLUTION: An exhaust device includes: an exhaust passage extending from one end part to the other end part in a cylindrical manner; a second exhaust passage provided so as to be adjacent to an upper region of the other end part of the exhaust passage; a suction exhaust port provided in the second exhaust passage, and performing suction exhaust of airflow supplied from the one end part of the exhaust passage and flowed to the other end part from the second exhaust passage; and an ultrasonic vibrator mounted on a wall body for regulating the second exhaust passage, and ultrasonically vibrating the wall body.
Inventors:
HATA TAKANORI
Application Number:
JP2014001100A
Publication Date:
July 16, 2015
Filing Date:
January 07, 2014
Export Citation:
Assignee:
DAINIPPON PRINTING CO LTD
International Classes:
F27D7/06
Attorney, Agent or Firm:
Hirohito Katsunuma
Hiroyuki Nagai
Katsuomi Isogai
Yukihiro Hotta
Hiroshi Nomoto
Hiroyuki Nagai
Katsuomi Isogai
Yukihiro Hotta
Hiroshi Nomoto