Title:
EXHAUST DEVICE
Document Type and Number:
Japanese Patent JP3917812
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide an exhaust device whose exhaust blower is not clogged by exhaust gas containing powder dust.
SOLUTION: The exhaust device is composed of: (a) a double pipe (3) having an inner tube (2) in an outer tube (1), (b) an exhaust blower (4) which is connected to the inner tube (2) and supplies air into the outer tube (1) so that the air is emitted toward the outlet (21) of the outer tube (1), and (c) an exhaust gas supplying tube (5) which is connected to the outer tube (1) and supplies exhaust gas (F3) containing powder dust (D) to the outer tube (1).
Inventors:
Keishi Imamura
Application Number:
JP2000368883A
Publication Date:
May 23, 2007
Filing Date:
December 04, 2000
Export Citation:
Assignee:
Kanken Techno Co., Ltd.
International Classes:
C23C16/44; H01L21/205; (IPC1-7): H01L21/205; C23C16/44
Domestic Patent References:
| JP2002054600A | ||||
| JP10009200A | ||||
| JP10331798A | ||||
| JP56085600A | ||||
| JP62008000A | ||||
| JP11033345A |
Attorney, Agent or Firm:
Yoshiaki Mori