排気ポンプ - From Co., Ltd.

Title:

排気ポンプ

Document Type and Number:

Japanese Patent JP3981772

Kind Code:

B2

Abstract:

PROBLEM TO BE SOLVED: To facilitate cleaning of an exhaust chamber, enhance efficiency of an exhaust pump and downsize it. SOLUTION: A piston 4 is set up in a cylinder, with one side serving as a suction chamber 7 and the other side serving as an exhaust chamber 9, and an exhaust pump 24 is formed by providing an atmosphere introducing hole 11 communicating with the exhaust chamber 9, to be operated as follows. In a direction of arrow mark 30, the piston 4 is moved so as to compress the exhaust chamber 9, a shutoff valve 15 is opened to evacuate gas from the inside of the exhaust chamber 9. The suction chamber 7 is sealed, to expand pressure reduced (b). By moving the piston 4, gas is put into the pressure reduced suction chamber 7 from a suction path 8, a connection destination can be degassed (c). After completion of exhaust, the exhaust chamber 9 is expandedly pressure- reduced, and gas passing a through hole 13 from the suction chamber 7, is fed to a side of the exhaust chamber 9 (d). Just before an O-ring 27 of the piston 4 passes through the atmosphere introducing hole 11, the inside of the exhaust chamber 9 is most pressure-reduced (e), in the point of time the O-ring 27 passes the atmosphere introducing hole 11, and the exhaust chamber 9 is cleaned by the outside air introduced as shown by an arrow mark 33.

Inventors:

Tatsuji Motomiya

Application Number:

JP11252197A

Publication Date:

September 26, 2007

Filing Date:

April 30, 1997

Export Citation:

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