Title:
EXHAUST SYSTEM
Document Type and Number:
Japanese Patent JP2017025793
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide an exhaust system appropriate for widening an operable condition of the entire exhaust system such as a continuously exhaustible gas flow rate by preventing gas condensation, coagulation and early overheat in a vacuum pump without increasing costs of the entire exhaust system.SOLUTION: An exhaust system S1 assumes a configuration that first and second vacuum pumps P1 and P2 are connected in series as at least two pumps and a gas including a condensate gas is exhausted through the vacuum pumps P1 and P2 and a connection C1 thereof. By installing the second vacuum pump P2 in the vicinity of the first vacuum pump P1, the exhaust system S1 then sets an internal environment of the connection C1 to be included in a vapor phase area lower than a steam pressure curve of the condensate gas flowing insides.SELECTED DRAWING: Figure 1
Inventors:
KABASAWA TSUYOSHI
NONAKA MANABU
NONAKA MANABU
Application Number:
JP2015145473A
Publication Date:
February 02, 2017
Filing Date:
July 23, 2015
Export Citation:
Assignee:
EDWARDS KK
International Classes:
F04B37/16; F04C25/02; F04D19/04
Domestic Patent References:
| JPH0419393B2 | 1992-03-30 | |||
| JPH09310696A | 1997-12-02 | |||
| JPS6346717Y2 | 1988-12-02 | |||
| JPH0612794U | 1994-02-18 | |||
| JP2005120955A | 2005-05-12 | |||
| JPH09219172A | 1997-08-19 |
Foreign References:
| WO2012046495A1 | 2012-04-12 |
Attorney, Agent or Firm:
Shigenori Wada
Hidehiko Komatsu
Hidehiko Komatsu