Title:
EXHAUST TREATMENT EQUIPMENT
Document Type and Number:
Japanese Patent JPH01139125
Kind Code:
A
Abstract:
PURPOSE:To promote solidification of a solid component by providing a reaction furnace for growing crystal on a substrate, a thermal cracking furnace which has a heating part and an expansion part in the rear flow thereof and solidifies an unreacted gaseous raw material, and a collecting means of the solid component. CONSTITUTION:A gaseous raw material such as AsH3 is introduced through a gas feed port 3 and crystal is grown on a semiconductor substrate 11 and the unreacted raw material discharged from a reaction furnace 1 is introduced into the heating part 17a of a thermal cracking furnace 17 and heated with a heater 27 and AsH3 is thermally decomposed into As and H2. Then the gas is introduced into an expansion part 17b and the flow velocity is reduced and solidification of As is promoted. Then the exhaust gas contng. As of a solid component is passed through a cyclone 19, a membrane filter 21 and a depth- type filter 23 to have its As collected and also its AsH3 absorbed at a chemical trap 25 and finally discharged to the outside.
Inventors:
OMINE TOSHIMITSU
HONDA YASUAKI
AKAGAWA KEIICHI
HONDA YASUAKI
AKAGAWA KEIICHI
Application Number:
JP30956387A
Publication Date:
May 31, 1989
Filing Date:
December 09, 1987
Export Citation:
Assignee:
TOSHIBA CORP
International Classes:
B01D53/04; B01D53/34; B01D53/46; B01D53/64; C30B25/14; H01L21/205; (IPC1-7): B01D53/04; B01D53/34; C30B25/14; H01L21/205
Attorney, Agent or Firm:
Yasuo Miyoshi (1 outside)
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