PURPOSE: To provide an exhauster, wherein the moving distance of a moving- type vacuum chamber can be sufficiently obtained, and the improvement for obtaining high exhaust efficiency is achieved.
CONSTITUTION: The constitution of an exhauster for discharging the air in a container 1, which is moved along a specified path, has the following parts. A vacuum pipe 5 is extending along the moving path of the container 1 and linked to a vacuum pump 8. A plurality of branch pipes 6 are branched from the vacuum pipe 5 to the specified positions on the moving path of the container 1. Connecting ports 7 are linked to the branching pipes 6 through opening and closing valves 9 and can be coupled with the exhaust port of the container 1 in the airtight mode.
JP2008192836 | CONVEYANCE CONTROLLER |
WO/2016/189975 | MULTISTAGE SHELF AND OVERHEAD TRAVELING VEHICLE SYSTEM USING SAME |
JPS63140523 | TREATMENT APPARATUS |