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Title:
EXHAUSTER
Document Type and Number:
Japanese Patent JPH06326170
Kind Code:
A
Abstract:

PURPOSE: To provide an exhauster, wherein the moving distance of a moving- type vacuum chamber can be sufficiently obtained, and the improvement for obtaining high exhaust efficiency is achieved.

CONSTITUTION: The constitution of an exhauster for discharging the air in a container 1, which is moved along a specified path, has the following parts. A vacuum pipe 5 is extending along the moving path of the container 1 and linked to a vacuum pump 8. A plurality of branch pipes 6 are branched from the vacuum pipe 5 to the specified positions on the moving path of the container 1. Connecting ports 7 are linked to the branching pipes 6 through opening and closing valves 9 and can be coupled with the exhaust port of the container 1 in the airtight mode.


Inventors:
TAKUBI ATSUSHI
Application Number:
JP13403793A
Publication Date:
November 25, 1994
Filing Date:
May 12, 1993
Export Citation:
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Assignee:
NIPPON STEEL CORP
International Classes:
H01L21/677; H01L21/68; (IPC1-7): H01L21/68
Attorney, Agent or Firm:
Youichi Oshima



 
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