EXHAUSTING SYSTEM FOR ION-INJECTOR

Title:

EXHAUSTING SYSTEM FOR ION-INJECTOR

Document Type and Number:

Japanese Patent JPH09199074

Kind Code:

A

Abstract:

PROBLEM TO BE SOLVED: To eliminate corona discharge generation in an exhaust duct due to polluting substances and to prevent burning and damaging of an exhaust duct by suppressing reactions between byproducts in the exhausting duct and byproducts newly jetted out to the exhaust duct. SOLUTION: This system consists of an exhaust pump, which exhausts a gas in an ion injector 10 by being communicated with the inside of the ion injector 10 and also carried out exhaust operation corresponding to a constant operation signal, and an exhaust duct 16 whose one end is connected with the exhaust pump 12 and the other end is connected with a main duct 14 to lead the exhaust gas exhausted out of the pump 12 to the outside. A pollution suppressing means 20 to suppress production of polluting substances in the exhaust duct 16 by reactions between the exhaust gas newly exhausted through the exhaust pump 12 and byproducts in the exhaust gas already existing in the inside of the exhaust duct 16.

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Inventors:

OO SOUKON
BUN JIYOUEI
KIN TEIKON
BOKU SANYUU

Application Number:

JP33428796A

Publication Date:

July 31, 1997

Filing Date:

December 13, 1996

Export Citation:

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Assignee:

SAMSUNG ELECTRONIC

International Classes:

H01J37/18; H01J37/317; H01L21/265; (IPC1-7): H01J37/317; H01J37/18; H01L21/265

Attorney, Agent or Firm:

Hagiwara Makoto

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