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Patent Searching and Data


Title:
EXPOSING DEVICE FOR PRINTING CIRCUIT BOARD
Document Type and Number:
Japanese Patent JPH0611839
Kind Code:
A
Abstract:

PURPOSE: To provide an exposing device whose workability is improved and furthermore, whose measuring accuracy is made better as to the exposing device which is the manufacturing device of a printing circuit board.

CONSTITUTION: Each station constituted of a pre-alignment station 102, a supplying station 103, a standby station 104, an alignment station 105 having a camera 133 and an XY theta table 134, an exposing station 106 having a light source 135 for exposure, a separation station 107, a taking-out station 108, and mask standby stations 110 and 111 is provided, and also mask stages 128 fixing a stage 118 and a mask 123 are plurally provided so that supplying and taking-out operations to the stage 118, a tightly contacting operation for the alignment and the mask 123, an exposing operation, and a peeling operation can be simultaneously performed in parallel at each independent station, a pitch time is shortened, and exposure whose measuring accuracy is good can be performed.


Inventors:
OCHI AKIO
YAMASHITA TOSHIAKI
Application Number:
JP16885392A
Publication Date:
January 21, 1994
Filing Date:
June 26, 1992
Export Citation:
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Assignee:
MATSUSHITA ELECTRIC IND CO LTD
International Classes:
G03F7/20; G03F9/00; H05K3/00; (IPC1-7): G03F7/20; G03F9/00; H05K3/00
Attorney, Agent or Firm:
Akira Kobiji (2 outside)