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Title:
EXPOSURE APPARATUS
Document Type and Number:
Japanese Patent JP2013037301
Kind Code:
A
Abstract:

To provide an exposure apparatus which reproduces the position and/or attitude of a lens before and after the replacement of a pressing member by using an inexpensive device requiring no large space.

An exposure apparatus includes an optical member 10, a support member 20 for supporting the optical member 10, plural elastic members 30 that are attached to the support member 20 and elastically deform at least in the radial direction of the optical member 10, a lens barrel 40 that is connected to the support member 20 via the elastic members 30, a pressing member 50 that applies a force to the elastic members 30, and a contact detection device 60 that detects a contact of the elastic members 30 and the pressing member 50.


Inventors:
NAKAJIMA TAKESHI
KUDO SATOSHI
Application Number:
JP2011175494A
Publication Date:
February 21, 2013
Filing Date:
August 11, 2011
Export Citation:
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Assignee:
CANON KK
International Classes:
G02B7/02
Attorney, Agent or Firm:
Yukio Takanashi



 
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