Title:
露出用コンパウンド、露出プロセス及び露出装置
Document Type and Number:
Japanese Patent JP2007533782
Kind Code:
A
Abstract:
The invention relates to an uncovering compound for uncovering surfaces of materials with pronounced Si crystals, in particular of cylinder bearing surfaces made from aluminum materials with pronounced Si primary crystals. The uncovering compound according to the invention preferably includes very fine uncovering material, particularly preferably comprising silicon carbide grains with a grain size in the range from 4 mum to 0.1 mum and/or ceramic fibers comprising Al2O3, which is embedded in a visco-elastic plastic carrier compound. The invention also describes a process and a corresponding apparatus in which the uncovering compound according to the invention is used.
Inventors:
Helmut Schaefer
Peter Stocker
Oliver Storz
Peter Stocker
Oliver Storz
Application Number:
JP2006529696A
Publication Date:
November 22, 2007
Filing Date:
April 22, 2004
Export Citation:
Assignee:
BASF AKTIENGESELLSCHAFT
International Classes:
C09K3/14; B24B31/116; B24B33/02; B24B37/02; B24B57/00; B24D3/00; B24D3/02; C09G1/02
Attorney, Agent or Firm:
Johei Nakamura
Eri Adachi
Eri Adachi