Title:
EXPOSURE CONTROLLER
Document Type and Number:
Japanese Patent JP3428966
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide an exposure controller which controls a laser to expose an object to be exposed to laser light with a target exposing energy without causing exposure errors at every pulse, even when characteristic variation occurs in the charging voltage and output energy of a laser.
SOLUTION: This exposure controller which controls the exposure of a device which exposes an object to be exposed to pulsed laser light by emitting the pulsed laser light a plurality of times by using a pulse laser as a light source is provided with a means which sets a target exposing energy at every pulse of the pulse laser, a means which controls the output energy of the laser at every pulse based on the target exposing energy, and a means which detects the exposing energy at every pulse of the laser. The controller is also provided with a feedback system which decides the charging voltage of the laser by means of the output energy control means from the target exposing energy and past actual exposing energy.
Inventors:
Hiroyuki Koide
Application Number:
JP2001001287A
Publication Date:
July 22, 2003
Filing Date:
May 10, 1996
Export Citation:
Assignee:
Canon Inc
International Classes:
G03F7/20; H01L21/027; (IPC1-7): H01L21/027; G03F7/20
Domestic Patent References:
| JP7106678A | ||||
| JP4252013A | ||||
| JP47883A | ||||
| JP8274399A | ||||
| JP4143763A | ||||
| JP5167162A |
Attorney, Agent or Firm:
Tetsuya Ito
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