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Patent Searching and Data


Title:
EXPOSURE DEVICE FOR COLOR FILTER AND METHOD FOR MANUFACTURING COLOR FILTER
Document Type and Number:
Japanese Patent JP2014013303
Kind Code:
A
Abstract:

To provide an exposure device that causes little decrease in illuminance and no decrease in productivity per unit time even when illumination light to a fly eye lens located in an optical path of the light is physically blocked so as to adjust a collimation half angle.

A proximity exposure device is provided, in which a photomask having a predetermined pattern is laid close to a substrate coated with a photosensitive resin and exposed to exposure light guided transmitted through a fly eye lens via a condensing mirror and guided by a concave mirror. A reflection mirror for reflecting light to the condensing mirror is disposed on a light-entering surface side in a periphery of the fly eye lens; and a light-shielding layer for adjusting a collimation half angle is formed on a light-transmitting surface side of a portion where the reflection mirror is disposed.


Inventors:
SHIBATA YASUHIRO
TATENUMA TOSHINORI
Application Number:
JP2012150394A
Publication Date:
January 23, 2014
Filing Date:
July 04, 2012
Export Citation:
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Assignee:
TOPPAN PRINTING CO LTD
International Classes:
G03F7/20; G02B19/00; H01L21/027