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Title:
EXPOSURE DEVICE
Document Type and Number:
Japanese Patent JP2012114358
Kind Code:
A
Abstract:

To provide an exposure device in which speckles of an optical image formed on a photosensitive medium can be made obscure, and occurrence of unevenness of brightness can be minimized effectively in an illuminated region.

An exposure device 10 comprises an optical element 50, an irradiation device 60, and a spatial light modulator 30. A hologram recording medium 55 is scanned with coherent light by using a scanning device 65, and coherent light irradiated from the hologram recording medium 55 impinges on the spatial light modulator 30 which overlaps an illuminated region LZ. Since a photosensitive medium 15 is arranged closely to the spatial light modulator 30, the coherent light can be guided onto the photosensitive medium 15 with an extremely simple configuration without highlighting the speckles.


Inventors:
ISHIDA KAZUTOSHI
KURASHIGE MAKIO
TAKANOKURA TOMOE
OYAGI YASUYUKI
Application Number:
JP2010263906A
Publication Date:
June 14, 2012
Filing Date:
November 26, 2010
Export Citation:
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Assignee:
DAINIPPON PRINTING CO LTD
International Classes:
H01L21/027; G02B19/00; G02B26/10
Domestic Patent References:
JP2009301066A2009-12-24
JPH01220825A1989-09-04
JP2004093624A2004-03-25
JP2010197916A2010-09-09
JP2008085266A2008-04-10
JP2001021721A2001-01-26
JP2009301066A2009-12-24
Attorney, Agent or Firm:
Hirohito Katsunuma
Hiroyuki Nagai
Katsuomi Isogai
Yukihiro Hotta
Yasushi Kawasaki



 
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