Title:
EXPOSURE DEVICE
Document Type and Number:
Japanese Patent JP2015079808
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide an exposure device capable of making an automatic determination on whether a laser error is caused by a bar mirror or another factor.SOLUTION: An exposure device comprises: a laser interferometer which detects a position; a system which measures a reflectance from a bar mirror, and to which an existing laser light source is diverted; and a controller which takes a result of the measurement and automatically determines whether a laser error is caused by a bar mirror or another factor.
Inventors:
MOROOKA YUHEI
Application Number:
JP2013215186A
Publication Date:
April 23, 2015
Filing Date:
October 16, 2013
Export Citation:
Assignee:
CANON KK
International Classes:
H01L21/027; G01N21/55; G03F7/20
Attorney, Agent or Firm:
Yukio Takanashi
Previous Patent: シーリング材組成物及び複合ガラス
Next Patent: MERCURY LAMP LIGHTING CONTROL METHOD AND EXPOSURE DEVICE
Next Patent: MERCURY LAMP LIGHTING CONTROL METHOD AND EXPOSURE DEVICE