Title:
露光装置
Document Type and Number:
Japanese Patent JP5618163
Kind Code:
B2
Abstract:
Electric power is generated by using a generator equipped with: a coil unit that is arranged on a barrel platform and incorporates coils; and a magnet unit that has a magnet section arranged on a protruding section of a column separated from the barrel platform in terms of vibration and generates an electromotive force in a non-contact state with the coils, and a motor that drives the magnet section, and thus a wiring that supplies electric power to the barrel platform does not have to be used. Accordingly, vibration that has been propagated to the barrel platform through the wiring can be precluded.
Inventors:
柴崎 祐一
Application Number:
JP2012232512A
Publication Date:
November 05, 2014
Filing Date:
October 22, 2012
Export Citation:
Assignee:
株式会社ニコン
International Classes:
H01L21/027; G03F7/20
Attorney, Agent or Firm:
Tokuji Tateishi