Title:
露光装置およびデバイス製造方法
Document Type and Number:
Japanese Patent JP4323759
Kind Code:
B2
Abstract:
Compatibility of a small spring constant and large supporting load is realized, so that a stable operation is assured even if a fine-movement linear motor fails. A supporting unit, having a plurality of magnets whose same poles are arranged facing each other, is adapted to support the self-weight of a top plate on which an object to be positioned is mounted, using a repulsive force in a direction orthogonal to the facing direction of the plurality of magnets. In a characteristic curve representing the relationship between the floating force and displacement in a floating direction, the tangent inclination when the object is at a first position in the floating direction is negative, and the relationship of floating force < the self weight holds when the object is at a second position lower than the first position.
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Inventors:
Nobu Shigeru Korenaga
Application Number:
JP2002152598A
Publication Date:
September 02, 2009
Filing Date:
May 27, 2002
Export Citation:
Assignee:
Canon Inc
International Classes:
F16C32/04; F16C29/00; F16C39/06; G03F7/20; H01L21/027; H01L21/68; H02K41/02
Domestic Patent References:
| JP10163023A | ||||
| JP5168107A | ||||
| JP2001230305A | ||||
| JP61270049A | ||||
| JP2001230178A | ||||
| JP2001349374A | ||||
| JP63109502U | ||||
| JP9112630A |
Attorney, Agent or Firm:
Keizo Nishiyama
Yuichi Uchio
Yuichi Uchio