Title:
露光装置、及びデバイス製造方法
Document Type and Number:
Japanese Patent JP4378938
Kind Code:
B2
Inventors:
Masato Hatazawa
Application Number:
JP2002340790A
Publication Date:
December 09, 2009
Filing Date:
November 25, 2002
Export Citation:
Assignee:
NIKON CORPORATION
International Classes:
G03F7/20; H01L21/027
Domestic Patent References:
| JP2001044264A | ||||
| JP9289160A | ||||
| JP2001291654A | ||||
| JP4287908A | ||||
| JP11249317A | ||||
| JP11297587A | ||||
| JP11212266A | ||||
| JP2003227986A |
Attorney, Agent or Firm:
Masatake Shiga
Tadashi Takahashi
Masakazu Aoyama
Kazuya Nishi
Tadashi Takahashi
Masakazu Aoyama
Kazuya Nishi