Title:
露光装置及びデバイス製造方法
Document Type and Number:
Japanese Patent JP4985812
Kind Code:
B2
Inventors:
Tsuneyuki Hagiwara
Masahiro Nakagawa
Masahiro Nakagawa
Application Number:
JP2010087346A
Publication Date:
July 25, 2012
Filing Date:
April 05, 2010
Export Citation:
Assignee:
NIKON CORPORATION
International Classes:
H01L21/027; G03F7/20
Domestic Patent References:
| JP6168866A | ||||
| JP6124873A | ||||
| JP10303114A | ||||
| JP11176727A |
Attorney, Agent or Firm:
Masatake Shiga
Tadashi Takahashi
Kazuya Nishi
Tadashi Takahashi
Kazuya Nishi