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Patent Searching and Data


Title:
露光装置、露光方法及びデバイス製造方法
Document Type and Number:
Japanese Patent JPWO2007094470
Kind Code:
A
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Inventors:
Hiroyuki Nagasaka
Application Number:
JP2007052885W
Publication Date:
August 23, 2007
Filing Date:
February 16, 2007
Export Citation:
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Assignee:
NIKON CORP.
International Classes:
H01L21/027; G03F7/20
Attorney, Agent or Firm:
Masatake Shiga
West Kazuya
Norio Takahashi



 
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