Title:
露光用マスク材料
Document Type and Number:
Japanese Patent JP4152523
Kind Code:
B2
Inventors:
Kunihiro Nakagawa
Kawai Nobuyuki
Masato Higashiyama
Kawai Nobuyuki
Masato Higashiyama
Application Number:
JP11905099A
Publication Date:
September 17, 2008
Filing Date:
April 27, 1999
Export Citation:
Assignee:
Mitsubishi Paper Mills Co., Ltd.
International Classes:
H01L21/027; G03C8/06; G03F1/56
Domestic Patent References:
| JP60033347U | ||||
| JP3126035A | ||||
| JP9006005A | ||||
| JP59126536A | ||||
| JP3015072A |
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