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Patent Searching and Data


Title:
EXPOSURE SYSTEM AND METHOD FOR FORMING PHOTORESIST
Document Type and Number:
Japanese Patent JP2002072490
Kind Code:
A
Abstract:

To provide an exposure system capable of enhancing processing capac ity and reducing processing cost.

A UV absorbing region is formed in a central region of an exposure stage 21 and a UV reflecting region 23 is formed around the UV absorbing region. The UV absorbing region is situated under the pattern forming region 13 of a glass substrate 12 and the UV reflecting region 23 is situated under the pattern formation needless region 14 of the glass substrate 12. Ultraviolet rays R are projected from a mercury lamp. The UV absorbing region absorbs the UV rays R and the UV reflection region 23 reflects the UV rays R. The pattern formation needless region 14 can be exposed more than the pattern forming region 13. An unnecessary photoresist can be dissolved and removed only by a single exposure step. Processing capacity can be enhanced and the processing cost of the glass substrate 12 can be reduced.


Inventors:
OSAWA YASUSHI
Application Number:
JP2000254536A
Publication Date:
March 12, 2002
Filing Date:
August 24, 2000
Export Citation:
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Assignee:
TOSHIBA CORP
International Classes:
G03F7/20; (IPC1-7): G03F7/20
Attorney, Agent or Firm:
Kabazawa Xiang (1 person outside)