Title:
ガスレーザ発振器における電極外放電検出方法
Document Type and Number:
Japanese Patent JP4610133
Kind Code:
B2
Inventors:
Yusuke Tomisho
Kenkichi Nakaoka
Kenkichi Nakaoka
Application Number:
JP2001218132A
Publication Date:
January 12, 2011
Filing Date:
July 18, 2001
Export Citation:
Assignee:
Amada Engineering Center Co., Ltd.
Amada Co., Ltd.
Amada Co., Ltd.
International Classes:
G01R31/24; H01S3/0975; H01S3/00
Domestic Patent References:
| JP6252470A | ||||
| JP59159582A | ||||
| JP2000036629A | ||||
| JP61198695A | ||||
| JP9232648A | ||||
| JP7297474A |
Attorney, Agent or Firm:
Hidekazu Miyoshi
Iwa Saki Kokuni
Kawamata Sumio
Masakazu Ito
Shunichi Takahashi
Toshio Takamatsu
Iwa Saki Kokuni
Kawamata Sumio
Masakazu Ito
Shunichi Takahashi
Toshio Takamatsu