Title:
EXTRA-HIGH VACUUM MEASURING APPARATUS
Document Type and Number:
Japanese Patent JPS63145934
Kind Code:
A
Abstract:
PURPOSE:To enable measurement of pressure in an extra-high vacuum area, by connecting a vacuum chamber to a gas inlet of a compressor and an extra- high vacuum meter to a gas outlet thereof. CONSTITUTION:When pressure at a gas inlet 15 of a compressor 14, namely, pressure in a vacuum atmosphere at a vacuum chamber 10 is represented by PA, pressure at a gas outlet 16 thereof 14, namely, pressure measured with an extra-high vacuum meter 17 by PB and compression ratio of the compressor 14 by Q, PAXQ=PB holds. Thus, by measuring the pressure PB in an extra- high vacuum with the vacuum meter 17, the pressure PA in an extra-high vacuum area can be determined by the pressure value thus obtained and the compression ratio Q of the compressor 14.
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Inventors:
MAEHANE YOSHIYASU
YAMAKAWA HIROYUKI
KIKUCHI RIICHI
YAMAKAWA HIROYUKI
KIKUCHI RIICHI
Application Number:
JP29233986A
Publication Date:
June 18, 1988
Filing Date:
December 10, 1986
Export Citation:
Assignee:
ULVAC CORP
International Classes:
G01L21/00; (IPC1-7): G01L21/00
Domestic Patent References:
| JPS338283Y1 |
Attorney, Agent or Firm:
Shigeru Yagita