Title:
EXTRA-HIGH VACUUM MEASURING APPARATUS
Document Type and Number:
Japanese Patent JPS63145936
Kind Code:
A
Abstract:
PURPOSE:To enable precise measurement, by connecting a vacuum chamber to a gas inlet of a compressor while an extra-high vacuum meter is connected to a gas outlet thereof to make the compressor reversible so that exhaustion inside a vacuum instrument is made possible as well during the exhaustion of the vacuum chamber. CONSTITUTION:When the rotation of a compressor 14 is reversed during the exhaustion of a vacuum chamber 10, air current is caused to flow toward a gas inlet 15 of a compressor 14 from a gas outlet 16 thereof 14. In other words, the flow of air current is generated toward the vacuum chamber 10 from the inside of a vacuum instrument 18 connected to the gas outlet 16 to allow quick exhaustion inside the vacuum instrument 18. This eliminates the possibility of obstructing measurement otherwise caused by a gas left in the vacuum instrument 18 thereby enabling precise measurement.
Inventors:
MAEHANE YOSHIYASU
YAMAKAWA HIROYUKI
KIKUCHI RIICHI
YAMAKAWA HIROYUKI
KIKUCHI RIICHI
Application Number:
JP29234186A
Publication Date:
June 18, 1988
Filing Date:
December 10, 1986
Export Citation:
Assignee:
ULVAC CORP
International Classes:
G01L21/00; (IPC1-7): G01L21/00
Attorney, Agent or Firm:
Shigeru Yagita
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