Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
EXTREMELY HIGH VACUUM METER
Document Type and Number:
Japanese Patent JPH0727648
Kind Code:
A
Abstract:

PURPOSE: To improve S/N ratio and then the sensitivity in vacuum measurement by improving the conventional Raffti type vacuum meter.

CONSTITUTION: In side a container-shaped body 1 with a magnet 6 at an outer periphery, a filament 2 for generating electrons by conduction and a cylindrical anode 3 surrounding the filament 2 are provided, at the same time, a ring-shaped upper shield 5a and a disc-shaped upper ion collector 4a which are laid out concentrically in the upper part of the anode 3 and a ring-shaped lower shield 5b and a ring-shaped lower ion collector 4b which are laid out concentrically in the lower part of the anode 3 are provided, and then a current measuring instrument 8 for measuring the degree of vacuum by measuring the output current from the upper and lower ion collectors 4a and 4b is provided.


Inventors:
ISHIMARU HAJIME
RON PAITETSUCHI
Application Number:
JP19689893A
Publication Date:
January 31, 1995
Filing Date:
July 14, 1993
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
SHINKU KAGAKU KENKYUSHO KK
International Classes:
G01L21/30; (IPC1-7): G01L21/30
Attorney, Agent or Firm:
Yoshihiko Iinuma (1 person outside)