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Title:
FORMATION METHOD OF Ib-IIIb-VIb2 COMPOUND SEMICONDUCTOR THIN FILM AND SOLAR CELL ELEMENT HAVING THE THIN FILM FORMED BY THE METHOD
Document Type and Number:
Japanese Patent JP2000150938
Kind Code:
A
Abstract:

To provide a method capable of obtaining a thin film, having a resistivity suitable as the light-absorbing layer of a solder cell in a method for forming an Ib-IIIb-VIb2 compound semiconductor (CuInS2) thin film by a CVD method (chemical vapor deposition method), using an organic metallic compound as its raw material.

First, raw gases of three components are introduced in a reaction layer 1 to cause a CuInS2 thin film to phase-grow on a substrate 4, in such a state that the temperature of the substrate 4 is held at a temperature of 440°C. The raw gases of the three components are (H2S/H2) gas, Ar gas containing vapor made of a Cu raw material 71 and Ar gas containing vapor made of an In raw material 81. Then, only the (H2S/H2) gas is introduced in the layer 1 to perform heat treatment on the thin film, in a state such that the temperature of the substrate 4 is held at a temperature of 550°C.


Inventors:
Watanabe, Takayuki
Nakazawa, Hidenobu
Jean, Marco Aglo
Application Number:
JP1998000316593
Publication Date:
May 30, 2000
Filing Date:
November 06, 1998
Export Citation:
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Assignee:
ASAHI CHEM IND CO LTDM 3 D MATERIALS DEVELOPMENT DESIGN & DEVICES SA
International Classes:
H01L21/365; C23C16/18; H01L31/04; (IPC1-7): H01L31/04; C23C16/18; H01L21/365