To provide an FA system provided with a function for automatically and temporarily stopping the progress of a lot by reserving the progress/stop of the lot.
The FA system provided with an FA computer 1 for controlling the manufacturing processes of a semiconductor device or the like and capable of controlling the aggregate (lot) of articles to be processed by the same processing condition under the control of the FA computer 1 and processing the lot of the articles by the determined order of processes while automatically distributing the lot through a semiconductor manufacturing equipment 3, a stocker 4 and carrying equipment 6 is provided with a progress/stop reservation means for reserving the progress/stop of the lot by specifying the identification number of the lot and a prescribed process to be progressed/stopped and a function for automatically progressing/stopping the lot on a stage satisfying the condition specified by the progress/stop reservation means.
MARUME YASUHIRO
TAKECHI TAKATSUGU
WATANABE TOSHIYUKI
OTANI MASAKI
INOBE TAKAMASA
OTA KATSUYA
SATO YASUHIRO
RYODEN SEMICONDUCTOR SYST ENG