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Title:
FABRICATION OF FINE STRUCTURE
Document Type and Number:
Japanese Patent JPH04239789
Kind Code:
A
Abstract:

PURPOSE: To fabricate a fine structure possessing a quantum well function in two directions with ease.

CONSTITUTION: There are provided a first process wherein there is formed a multiple quantum well structure composed of a material A (Al0.5Ga0.5As layer 3) and a material B (Al0.2Ga0.8As layer 4), a second process wherein a cross section of the foregoing multiple quantum well structure is taken out, and a third process wherein there is formed on the foregoing cross section a first quantum well structure composed of a material C (Al0.7Ga0.3As layers 6, 10) and a material D (GaAs layer 7). Further, in the third process, there are set a quantum barrier of the first layer of a single quantum well structure and the width of the quantum well such that a carrier wave function in the single quantum well is influenced by the materials A and B.


Inventors:
YAGI KATSUMI
Application Number:
JP607591A
Publication Date:
August 27, 1992
Filing Date:
January 23, 1991
Export Citation:
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Assignee:
HIKARI GIJUTSU KENKYU KAIHATSU
International Classes:
H01L21/203; H01L21/306; H01S5/00; (IPC1-7): H01L21/203; H01L21/306; H01S3/18
Attorney, Agent or Firm:
Nakajima Shiro



 
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