FAILURE PREDICTION SYSTEM FOR GAS DISCHARGER SUCH AS VACUUM PUMP

Title:

FAILURE PREDICTION SYSTEM FOR GAS DISCHARGER SUCH AS VACUUM PUMP

Document Type and Number:

Japanese Patent JP2005227023

Kind Code:

A

Abstract:

To provide a failure prediction system for fitly performing maintenance on a monitoring object.

This failure prediction system 1 for monitoring a gas discharger used for discharging gas emitted in a manufacturing process such as a semiconductor producing process, is equipped with: at least one vibration generation element 11 provided on a casing of the gas discharger and capable of vibrating the casing by generating vibration; at least one vibration detection element 13 provided on the casing of the gas discharger for detecting vibration generated in the casing owing to the vibration generated by the generation element 11; and a protector 12 for controlling the behavior of the generation element 11, receiving an output signal of the detection element 13, storing therein a structural change with time in the gas discharger, and issuing an alarm when the change exceeds a prescribed value.

Inventors:

OYAMA ATSUSHI

Application Number:

JP2004033664A

Publication Date:

August 25, 2005

Filing Date:

February 10, 2004

Export Citation:

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Assignee:

EBARA DENSAN LTD

International Classes:

G01M7/02; F04B49/10; (IPC1-7): G01M7/02; F04B49/10

Attorney, Agent or Firm:

Kazuo Shamoto
Hideo Tanaka
Otsuka Sumie
Fumitoshi Nishiyama

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