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Patent Searching and Data


Title:
FAN FILTER DEVICE FOR CLEAN ROOM
Document Type and Number:
Japanese Patent JPH06159752
Kind Code:
A
Abstract:

PURPOSE: To provide a fan filter device for a clean room generating a low noise sound by a method wherein a shielding plate having a sound muffling material stuck thereto is fixed within a chamber to cause the distribution of air blowing speed is made uniform.

CONSTITUTION: A blower 2 comprised of an inlet cone 21 and a runner 22 rotated in a horizontal direction is fixed to a central part of a top plate within a chamber 1 having its lower part opened. In a fan filter device for a clean room having a filter 3 fixed to a lower opening, a first shielding plate 4 having a sound muffling material 44 with a flange 42 inclined to enclose the runner 22 is fixed in a space between a blower 2 and a filter 3, and a second shielding plate 5 having sound muffling material 44 kept in a horizontal direction or inclined with a specified space with a flange of the first shielding plate 4 is fixed to a side plate of a chamber. With such an arrangement as above, it is possible to make a uniform distribution of air speed of blown air, increase a sound absorbing effect and reduce a generated noise.


Inventors:
NABESHIMA YASUSHI
ISHITOBI KOJI
Application Number:
JP34167092A
Publication Date:
June 07, 1994
Filing Date:
November 27, 1992
Export Citation:
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Assignee:
SHINKO KOGYO KK
International Classes:
B01D46/52; E04H5/02; F24F7/06; (IPC1-7): F24F7/06; B01D46/52; E04H5/02
Attorney, Agent or Firm:
Okamoto Tomisaburo