Title:
締結部材および真空装置
Document Type and Number:
Japanese Patent JP5865483
Kind Code:
B2
Abstract:
The present invention provides a fastening member which involves only a low risk of contamination even after repeatedly performing a detachment operation, and to provide a vacuum device including it. One embodiment is a fastening member comprising: a head section including a head-upper-face portion, a seating face portion, and a head-side-face portion; and a shaft section and including a threaded portion on an end portion thereof on the opposite side from the head section, wherein the threaded portion is given hardness higher than at least those of the other portions of the fastening member, and when the member is attached to the inner wall of the chamber with the fastening member, the threaded portion is threadedly engaged with an internally threaded portion provided in the inner wall of the chamber, and the sealing face portion presses the member against the inner wall of the chamber.
Inventors:
Ishihara Shigenori
Application Number:
JP2014504470A
Publication Date:
February 17, 2016
Filing Date:
September 12, 2012
Export Citation:
Assignee:
Canon ANELVA Corporation
International Classes:
C23C14/00; C23C16/44
Domestic Patent References:
| JP11092913A | ||||
| JP2009191339A | ||||
| JP62040319U | ||||
| JP2011256412A | ||||
| JP2011228343A | ||||
| JP4202768A | ||||
| JP8041637A | ||||
| JP2001323377A | ||||
| JP2008270595A |
Attorney, Agent or Firm:
Okabe
Koji Yoshizawa
Takashi Kawasaki
Koji Yoshizawa
Takashi Kawasaki