Title:
締結構造、該締結構造を用いた基板処理装置及び該締結構造に用いられるワッシャ付被締結部材
Document Type and Number:
Japanese Patent JP5750495
Kind Code:
B2
Inventors:
Yasuyuki Hayashi
Hino Tadayoshi
Hino Tadayoshi
Application Number:
JP2013254137A
Publication Date:
July 22, 2015
Filing Date:
December 09, 2013
Export Citation:
Assignee:
spp Technologies Co., Ltd.
International Classes:
F16B5/02; F16B43/00
Domestic Patent References:
| JP4057653U | ||||
| JP2002303314A | ||||
| JP2009224432A | ||||
| JP3175118U |
Attorney, Agent or Firm:
Makoto International Patent Office