To generate a driving signal from actual vibration waveforms with high precision without causing a shock.

In a controller 20, a dividing and driving signal is generated so that the divided actual vibration waveforms agree with the vibration given to a sample SP by providing overlapping time and dividing the actual vibration waveforms per predetermined time, and these dividing and driving signals are mutually joined to generate the driving signal. Here, the time when the driving signals agree mutually or the time when they approach to each other the most during the overlapping time of the actual vibration waveforms is detected, and the driving signals are mutually joined to switch the driving signals at the time.