PURPOSE: To produce an Fe alloy two-layer film having a high saturation magnetic flux density by laminating an Fe alloy thin film contg. nitrogen on an oriented Fe thin film obtd. by annealing an Fe thin film formed on a substrate at a specified temp.

CONSTITUTION: An Fe thin film is formed on a substrate by sputtering, vacuum deposition, etc. The thin film is then annealed at 750-850°C to obtain a (100) oriented Fe thin film which is used as a substrate film. An iron nitride thin film is then formed on the substrate film by sputtering, vacuum deposition, etc., and the nitrogen content is controlled to 2-20 atomic %. The Fe-alloy multilayer film is utilized to obtain a high-performance magnetic head, thin-film transformer and magnetic recording medium.