Title:
アノードに給電可能な給電体及びめっき装置
Document Type and Number:
Japanese Patent JP6795915
Kind Code:
B2
Abstract:
There is provided a feeder capable of reducing deterioration of the contact state between the feeder and an anode more than the prior art as dissolution of the anode progresses. The feeder can supply power to the anode 5 for use in plating a substrate in a plating tank. The feeder includes a main body portion 1 which can be disposed on an outer periphery of the anode 5 and a spring 88 which is disposed in the main body portion 1 and can apply a first force 100 to the main body portion 1 in a direction from the main body portion 1 toward a region 80 surrounded by the main body portion 1.
Inventors:
Junpei Fujikata
Application Number:
JP2016116136A
Publication Date:
December 02, 2020
Filing Date:
June 10, 2016
Export Citation:
Assignee:
Ebara Corporation
International Classes:
C25D17/12; C25D7/12; C25D17/10; C25D21/00
Domestic Patent References:
| JP2009046724A | ||||
| JP4045521U | ||||
| JP2009155726A |
Foreign References:
| US2482374 |
Attorney, Agent or Firm:
Toru Miyamae
Yukio Kanegae
Makoto Watanabe
Koichi Kushida
Yukio Kanegae
Makoto Watanabe
Koichi Kushida